Serie di prodotti con Assi Pronti per il Vuoto

Serie di prodotti con Assi Pronti per il Vuoto

PI offre all'interno del proprio catalogo una selezione di prodotti che sono già idonei per l'uso in alto vuoto (HV) o ultra-alto vuoto (UHV).

Inoltre, la maggior parte delle soluzioni a singolo asse o multiasse di PI possono essere modificate su richiesta per l'utilizzo in vuoto. Maggiori informazioni sono disponibili nella pagina dedicata >> Vacuum technology.

Hexapods

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
  • Vaccum Version
  • Range ±50 / ±50 / ±25 mm
  • Rotation range ±15 / ±15 / ±30°

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Vacuum version
  • Range ±17 / ±16 / ±6.5 mm
  • Rotation range ±10 / ±10 / ±21°
  • MiM 0.2 / 0.2 / 0.08 µm
  • Load capacity 5 kg

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
  • Vacuum version
  • Range ± 22.5 / ±22.5 / ±12.5 mm
  • Rotation range ±7.5 / ±7.5 / ±12.5°
  • Load capacity 5 kg

Stage Lineari e di Rotazione

RS-40 V7 Compact Rotation Stage Suitable for Vacuum

Precision Positioning

M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

High Travel Accuracy

L-509 V6 • V7 • V9 Vacuum-Compatible Precision Linear Stage

Compact Design, for Loads to 10 kg

L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages
PI L-500

L-500 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
Adapter Bracket
Novità

AB-65 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
VFxx Vacuum Feedthroughs

C-815.VFxx Vacuum Feedthroughs

Interfaces Between Air Side and High Vacuum (HV) or Ultrahigh Vacuum (UHV)

L-220 V6 High-Resolution Linear Actuator Suitable for Vacuum

Suitable for High Cycle Numbers

Attuatori PIezo e Stage

P-841 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces, with Position Sensor

P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

P-216 PICA Power Piezo Actuators

Preloaded Piezo Actuators (HVPZT) with Sensor Option
  • Travel range to 180µm
  • Push force to 4500N
  • Pull force to 500N
  • Subnanometer resolution
  • For vacuum/ high temperature

P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

P-845 Preloaded Piezo Actuators

For Very High Loads and Forces, with Position Sensor

P-844 Preloaded Piezo Actuators

For Very High Loads and Forces

P-840 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces

P-753 LISA Linear Actuator and Positioning Stage

Dynamic and Stable in Position

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-518 • P-528 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

P-235 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • High Force
  • Travel range 180µm
  • Extremely high stiffness
  • Push force to 30000N
  • Pull force to 3500N

N-480 High-Precision Kinematic Mirror Mount

With N-470 PiezoMike Linear Actuators

N-470.V PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa

P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges

P-620.1 • P-629.1 PIHera Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

Sensors

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors
  • Highest precision
  • Resolution to 0.01nm
  • Linearity error to 0,01%
  • Measuring range to 300µm