NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 300 N feed force; incremental linear encoder; 2 m cable length
N-216 NEXLINE® Linear Actuator
Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle
- Force generation to 600 N
- Holding force to 800 N
- Travel range 20 mm
- Integrated direct-measuring linear encoder with resolution 5 nm
Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
- Motion in strong magnetic fields and in a vacuum
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Suitable for sophisticated vacuum applications
Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.
Specifications
Specifications
Motion | N-216.1A1 | N-216.2A1 | Tolerance |
---|---|---|---|
Active axes | X | X | |
Travel range in X | 20 mm | 20 mm | |
Travel range in X (analog mode) | ± 3 µm | ± 3 µm | |
Velocity (10% duty cycle, full-step mode) | 1 mm/s | 1 mm/s | max. |
Velocity (100% duty cycle, full-step mode) | 0.6 mm/s | 0.6 mm/s | max. |
Velocity (100% duty cycle, nanostepping mode) | 0.4 mm/s | 0.4 mm/s | max. |
Positioning | N-216.1A1 | N-216.2A1 | Tolerance |
Reference switch | Optical, direction sensing (reference edge track), 5 V, TTL | Optical, direction sensing (reference edge track), 5 V, TTL | |
Resolution in X, open loop | 0.03 nm | 0.03 nm | typ. |
Integrated sensor | Incremental linear encoder | Incremental linear encoder | |
System resolution in X | 5 nm | 5 nm | |
Drive Properties | N-216.1A1 | N-216.2A1 | Tolerance |
Drive type | NEXLINE® piezo walking drive | NEXLINE® piezo walking drive | |
Operating voltage | -250 to +250 V | -250 to +250 V | |
Drive force in X | 300 N | 600 N | max. |
Mechanical Properties | N-216.1A1 | N-216.2A1 | Tolerance |
Holding force in X, passive | 400 N | 800 N | min. |
Overall mass | 1150 g | 1250 g | |
Material | Aluminum, stainless steel | Aluminum, stainless steel | |
Miscellaneous | N-216.1A1 | N-216.2A1 | Tolerance |
Operating temperature range | 0 to 55 °C | 0 to 55 °C | |
Connector | D-sub 25-pin (m) | D-sub 25-pin (m) | |
Cable length | 2 m | 2 m | +50 / -0 mm |
Recommended controllers / drivers | E-712.1AM | E-712.1AM |
Velocity in full-step mode: Depending on drive electronics.
Velocity in nanostepping mode: Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when performing the steps.
Drive force: Data refer to full step mode operation.
Downloads
Datasheet
Documentation
User Manual MP120
N-216 NEXLINE® Linear Actuator
3D Models
N-216 3-D model
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 600 N feed force; incremental linear encoder; 2 m cable length
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Tecnologia
PiezoWalk® Walking Drives
I dispositivi PiezoWalk® sono stati sviluppati più di 10 anni fa per l'industria dei semiconduttori, un settore esigente in termini di affidabilità, risoluzione della posizione e stabilità a lungo termine.
Sensori Incrementali
PI utilizza sistemi di misurazione incrementali per lunghe corse, partendo da circa un millimetro. Questi sensori, che nella maggior parte sono ottici, raggiungono una risoluzione di posizionamento al di sotto del range del picometro.
Posizionatori Multi-Asse
Le piattaforme Hexapod vengono utilizzate per il posizionamento e l'allineamento di precisione di carichi in tutti i sei gradi di libertà. tre assi lineari, e tre assi di rotazione.
Vuoto
Gestione attenta, locali adeguati: PI non solo ha le attrezzature necessarie per la qualificazione dei materiali, dei componenti e dei prodotti finiti, ma vanta anche molti anni di esperienza per quanto riguarda sistemi di posizionamento in HV e UHV.