A-41x PIglide FPC: Flat, Circular Air Bearing Modules

Friction-free, modular air bearings

Diameters from 25 mm to 300 mm
Load capacity to 15500 N
Stiffness to 860 kN/mm
Mounting hardware, customizations, and accessories available

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Mounting hardware dimensions: 13 mm ball interface diameter

Mounting hardware dimensions: 20 mm ball interface diameter

The PIglide Flat Pad Circular air bearing series is suitable for applications that require friction-free, accurate linear or planar motion. The modular concept of these air bearings allows the user to build their own motion system. Several bearings can be combined to increase the load capacity or to create multi-axis motion platforms.

For setting up positioning, scanning, metrology, inspection, and calibration systems.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

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Part #	Diameter / mm	Ball interface diameter / mm	Load capacity / N	Stiffness / N/µm	Air consumption / l/h (SCFH)	Mass / g
A-411.025	25	13	88	17.5	60 (2)	16
A-411.040	40	13	220	28.0	60 (2)	42
A-411.050	50	13	330	52.5	85 (3)	66
A-411.065	65	13	660	78.8	115 (4)	171
A-411.080	80	13	1010	111	170 (6)	259
A-411.100	100	20	1710	175	170 (6)	505
A-411.125	125	20	2780	254	230 (8)	1105
A-411.150	150	20	4000	350	285 (10)	1590
A-411.200	200	20	7700	520	570 (20)	4040
A-411.300	300	20	15500	860	850 (30)	12000

Air supply
Operating pressure	80 psi (550 kPa) nominal
Air quality	Clean (filtered to 1.0 μm or better) - ISO 8573‑1 Class 1 Oil free - ISO 8573‑1 Class 1 Dry (-15 °C dew point) - ISO 8573‑1 Class 3
Miscellaneous
Guideway surface flatness	< 1µm / 300 mm
Nominal fly-height	10 - 15 µm
Materials	Hardcoat aluminum, stainless steel fasteners
Recommended guideway materials	Guideways are supplied by the customer. Granite, hardcoat aluminum, stainless steel, ceramics, nickel-plated steel, nickel-plated cast iron
Air bearing Type	Discrete orifice

Mounting hardware (sold separately)
Part #	Description	Ball interface diameter
A-412.013S	Threaded ball stud assembly	13
A-412.013N	Mounting nut	13
A-412.013P	Retaining plate	13
A-412.020S	Threaded ball stud assembly	20
A-412.020N	Mounting nut	20
A-412.020P	Retaining plate	20