Beam Shaping and Steering

Beam shaping and beam steering allow for precise customization of beams to meet the requirements of high-tech applications, such as those in the semiconductor or microscopy industries. These applications require long-term positioning with minimal drift of optical components. With their bi-phase inertia drive technology, PI’s miniature linear stages offer precise positioning with high force and resolution, as well as long-term stability, making them the perfect choice for demanding industrial or microscopic tasks. Their compact size makes them ideal for use in space-constrained environments, while easy stackability enables flexible multi-axis configurations for complex positioning requirements. In the semiconductor industry, beam shaping and steering are of particular importance in quality control processes for wafers, for example those in overlay metrology, where precise positioning of apertures is essential. In the field of microscopy, they facilitate precise light control at nanometer scales, which is crucial for modern high resolution techniques, such as TIRF or STED microscopy.