XY Stages

Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation.

PI makes use of own developments in the fields of PIMag® magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.

For microscopy applications e.g. in the field of topology measurement, fast, repeatable scanning is combined with best velocity constancy by PIline® driven sample stages. Their low profile is outstanding in this field. Combination with piezo flexure sample stages makes them very versatile. 

Piezo Flexure Stages

P-545.xR8S PInano® XY(Z) Piezo System

Inexpensive Nanopositioning System for High-Resolution Microscopy
  • Travel range X/Y: 200 µm
  • Travel range Z: 200 µm
  • Max. payload: 5 kg

P-545.xC8S PInano® Cap XY(Z) Piezo System

Capacitive Position Measuring for Super-Resolution Microscopy
  • Travel range X/Y: 200 µm
  • Travel range Z: 200 µm
  • Max. payload: 5 kg

P-545.3D8S PInano® Trak Piezo Tracking System

Fast XY(Z) Stage for High Dynamics Microscopy
  • Travel range X/Y: 70 µm
  • Travel range Z: 50 µm
  • Max. payload: 10 kg

P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

P-734 XY Piezo Scanner

Highly Dynamic, Highest Travel Accuracy, with Aperture

P-612.2 XY Piezo Nanopositioner

Compact, with Aperture
  • Compact: Surface 60 mm × 60 mm
  • 100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open loop)
  • For cost-critical applications
  • Clear aperture 20 mm × 20 mm

P-611.XZ • P-611.2 XZ and XYZ Nanopositioner

Compact Two-Axis Piezo Nanopositioner

P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges
  • Travel range X/Y/Z: to 1500 µm
  • Bidirectional repeatability X/Y: to 2 nm
  • Max. payload: 1 kg

XY Metrology Stages

NEW

V-781 Ultra-Precision Direct Drive XY Stage

Ideal for Scanning, Measuring, and Imaging
  • Travel range X/Y: 110 mm - 310 mm
  • Bidirectional repeatability X/Y: 0.07 µm
  • Max. payload: to 30 kg
  • Max. velocity: to 1000 mm/s

V-741 High-Precision XY Stage

High Run-Out Accuracy and Stability, 305 mm × 305 mm Travel Range, Linear Motors

L-741 Precision XY Stage

High Run-Out Accuracy and Stability, 305 × 305 mm Travel Range
  • Travel range X/Y: 305 mm
  • Bidirectional repeatability X/Y: to 1 µm
  • Max. payload: 20 kg
  • Max. velocity: to 90 mm/s

L-738 Precision XY Stage

Clear Aperture, High Run-Out Accuracy, and Stability
  • Travel range X/Y: 102 mm
  • Bidirectional repeatability X/Y: to 1 µm
  • Max. payload: 20 kg
  • Max. velocity: to 90 mm/s

V-738 High-Precision XY Stage

Clear Aperture, High Run-Out Accuracy and Stability, Linear Motors

U-723 PILine® XY Stage

Compact XY Stage with Ultrasonic Piezo Motors

V-731 High-Precision XY Stage

High Travel Accuracy and Stability, Linear Motor

L-731 Precision XY Stage

High Run-Out Accuracy and Stability
  • Travel range X/Y: 205 mm
  • Bidirectional repeatability X/Y: to 1 µm
  • Max. payload: 20 kg
  • Max. velocity: to 90 mm/s

A-322 PIglide HS Planar Scanner with Air Bearing

XY Positioning System with 1 nm Resolution
  • XY air bearing stage, planar, high performance, travel to 1 m, linear motors, absolute encoder, nanometer precision. For high accuracy automation & metrology.

A-311 PIglide IS Planar Scanner with Air Bearing

High-Performance, Compact XY Nanopositioning System
  • Compact XY-nanopositioning system
  • High-precision positioning
  • Low profile
  • Travel ranges up to 300mm × 400mm
  • Load capacity up to 147N

XY & XYZ Sample Stages for Microscopy

U-781 PILine® XY Stage System with Controller and Joystick

For Inverted Microscopes from Nikon, Olympus, Zeiss, and Leica
  • Travel range X/Y: 128 mm / 86 mm
  • Max. payload: 2.5 kg
  • Max. velocity: 120 mm/s

U-760 PILine® XY Stage System with Controller and Joystick

Compact, low vibration, low profile

M-971 Motorized OEM XY Stage

Low Price with High Quantities

P-545.xR8S PInano® XY(Z) Piezo System

Inexpensive Nanopositioning System for High-Resolution Microscopy
  • Travel range X/Y: 200 µm
  • Travel range Z: 200 µm
  • Max. payload: 5 kg

P-545.xC8S PInano® Cap XY(Z) Piezo System

Capacitive Position Measuring for Super-Resolution Microscopy
  • Travel range X/Y: 200 µm
  • Travel range Z: 200 µm
  • Max. payload: 5 kg

M-545 Microscope XY Stage

Compact, Stable, Long Travel Range

XY Motion Systems

NEW

X-365 Precision XY Gantry System

Standardized Modular Platform for Industrial Automation
  • Modular XY gantry system
  • Various travel ranges and configurations
  • High-performance ironless linear motors
  • Absolute encoders with nanometer resolution
  • Precision recirculating ball bearing guides
  • Thermally decoupled components
  • Comprehensive service offering

A-352 MGS Large Format Gantry System with Linear Motors

Robust Compact Design with Recirculating Ball Bearing Guides for High Load Capacity.

X-417 Integrated Multi-Axis System

XY Positioning System • Additional Options • Freely Configurable
  • Maximize efficiency and accuracy in industrial automation with the X-417 multi-axis system, tailored for laser micromachining, testing, and metrology.

A-351 MGS Gantry System with Linear Motors

Robust Compact Design with Recirculating Ball Bearing Guides for High Load Capacity.

A-341 PIglide HGS Hybrid Gantry System

Hybrid Guide Design with Air Bearings and Recirculating Ball Bearing Guides for High Precision with Low Profile.

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